EFFECT OF ENERGETIC BOMBARDMENT ON THE MAGNETIC COERCIVITY OF SPUTTERED PT/CO THIN-FILM MULTILAYERS

被引:67
作者
CARCIA, PF [1 ]
SHAH, SI [1 ]
ZEPER, WB [1 ]
机构
[1] PHILIPS RES LABS,5600 JA EINDHOVEN,NETHERLANDS
关键词
D O I
10.1063/1.102912
中图分类号
O59 [应用物理学];
学科分类号
摘要
Pt/Co multilayers are an attractive candidate for a magneto-optical recording medium. However, films sputter deposited in Ar have coercivities too small (100-350 Oe) to be practical in recording. By sputter depositing multilayers in Kr or Xe instead of Ar, we achieved coercivities ∼1000 Oe, suitable for recording. We attribute the lower coercivity of Ar-sputtered films to interfacial mixing of Pt and Co layers by energetic bombardment from Ar gas atoms that recoil from the Pt target.
引用
收藏
页码:2345 / 2347
页数:3
相关论文
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