THE ROLE OF ION-ASSISTED DEPOSITION IN THE FORMATION OF DIAMOND-LIKE CARBON-FILMS

The recent interest in diamond-like carbon (DLC) and its special properties and applications has resulted in attempts to deposit such films at greater rates and over larger areas. It is necessary that the new methods retain the special properties of the DLC material. The purity and structure of the films will be discussed from the point of view of high kinetic energy of the atoms on the surface and the additional kinetic energy supplied to the film by ion assisted deposition through the simultaneous bombardment by 40-200 eV argon ions. © 1990, American Vacuum Society. All rights reserved.