THE ROLE OF ION-ASSISTED DEPOSITION IN THE FORMATION OF DIAMOND-LIKE CARBON-FILMS

被引：15

作者：

AISENBERG, S

机构：

[1] Data Associates, Natick, Massachusett, 01760

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1990年 / 8卷 / 03期

关键词：

D O I：

10.1116/1.577031

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The recent interest in diamond-like carbon (DLC) and its special properties and applications has resulted in attempts to deposit such films at greater rates and over larger areas. It is necessary that the new methods retain the special properties of the DLC material. The purity and structure of the films will be discussed from the point of view of high kinetic energy of the atoms on the surface and the additional kinetic energy supplied to the film by ion assisted deposition through the simultaneous bombardment by 40-200 eV argon ions. © 1990, American Vacuum Society. All rights reserved.

引用

页码：2150 / 2154

页数：5