CHARACTERIZATION OF FILMS DEPOSITED BY INSITU WALL CARBONIZATION IN TEXTOR

被引:18
作者
BESOCKE, K [1 ]
FLENTJE, G [1 ]
LITTMARK, U [1 ]
ESSER, HG [1 ]
WIENHOLD, P [1 ]
WINTER, J [1 ]
机构
[1] FORSCHUNGSZENTRUM JULICH, INST PLASMAPHYS, D-5170 JULICH 1, FED REP GER
关键词
D O I
10.1016/0022-3115(87)90417-X
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
引用
收藏
页码:651 / 654
页数:4
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