MAXIMUM THICKNESS OF AMORPHOUS NIZR INTERLAYERS FORMED BY A SOLID-STATE REACTION TECHNIQUE

被引：82

作者：

MENG, WJ

NIEH, CW

JOHNSON, WL

机构：

来源：

APPLIED PHYSICS LETTERS | 1987年 / 51卷 / 21期

关键词：

D O I：

10.1063/1.98546

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：1693 / 1695

页数：3

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