120-GHz long-wavelength low-capacitance photodetector with an air-bridged coplanar metal waveguide

被引：21

作者：

Tan, IH

Sum, CK

Giboney, KS

Bowers, JE

Hu, EL

Miller, BI

Capik, RJ

机构：

[1] UNIV CALIF SANTA BARBARA,DEPT ELECT & COMP ENGN,SANTA BARBARA,CA 93106

[2] AT&T BELL LABS,HOLMDEL,NJ 07733

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 1995年 / 7卷 / 12期

关键词：

D O I：

10.1109/68.477288

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We demonstrate a long-wavelength detector structure using an undercut mesa and an air-bridged coplanar metal waveguide to significantly reduce both the diode RC constant and the parasitic capacitance, Record electrical bandwidths of 120 GHz are demonstrated for long-wavelength photodetectors.

引用

收藏

页码：1477 / 1479

页数：3

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