THE EFFECT OF GROWTH TEMPERATURE ON ALAS GAAS RESONANT-TUNNELING DIODES

被引:11
作者
FORSTER, A [1 ]
LANGE, J [1 ]
GERTHSEN, D [1 ]
DIEKER, C [1 ]
LUTH, H [1 ]
机构
[1] FORSCHUNGSZENTRUM JULICH,INST FESTKORPERFORSCH,D-52425 JULICH,GERMANY
关键词
D O I
10.1088/0022-3727/27/1/028
中图分类号
O59 [应用物理学];
学科分类号
摘要
In this paper we report on a systematic investigation of the influence of the growth temperature on the current voltage (I-V) characteristics of symmetric AlAs/GaAs double-barrier tunnelling diodes grown by molecular beam epitaxy (MBE) and a correlation between electrical and structural properties. It is shown by high-resolution transmission electron microscopy (HRTEM) that the growth temperature affects the interface roughness and the symmetry of the double-barrier region. Both the microstructure of the interfaces and the Si doping spreading in the double-barrier region have a significant influence on the peak-to-valley ratio (PVR) and the symmetry of the I-V characteristic. The substrate temperature was varied from 480 to 680-degrees-C. It is demonstrated that the highest PVRS at room temperature are found for samples grown in the temperature range 580-600-degrees-C.
引用
收藏
页码:175 / 178
页数:4
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