共 13 条
[5]
Diffusion barrier property of TiN and TiN/Al/TiN films deposited with FMCVD for Cu interconnection in ULSI[J] . Young-Hoon Shin,Yukihiro Shimogaki.Science and Technology of Advanced Materials . 2004 (4)
[7]
Characterization of thermally treated TiAlSiN coatings by TEM and nanoindentation[J] . M. Parlinska-Wojtan,A. Karimi,O. Coddet,T. Cselle,M. Morstein.Surface & Coatings Technology . 2004
[8]
Atomic environment and interfacial structural order of TiAlN/Mo multilayers[J] . C.J. Tavares,L. Rebouta,J.P. Rivière,T. Girardeau,P. Goudeau,E. Alves,N.P. Barradas.Surface & Coatings Technology . 2004 (2)
[9]
Correlation between constitution, properties and machining performance of TiN/ZrN multilayers[J] . Surface & Coatings Technology . 2004
[10]
The electrochemical corrosion behavior of TiN and (Ti,Al)N coatings in acid and salt solution[J] . Ying Li,Li Qu,Fuihui Wang.Corrosion Science . 2003 (7)