全方位离子注入与沉积类金刚石碳膜的结构与性能

被引：5

作者：

刘洪喜 ^{[1
]}

蒋业华 ^{[1
]}

周荣 ^{[1
]}

汤宝寅 ^{[2
]}

机构：

[1] 昆明理工大学机电工程学院

[2] 哈尔滨工业大学现代焊接生产技术国家重点实验室

来源：

材料热处理学报 | 2010年 / 31卷 / 02期

关键词：

类金刚石碳膜(DLC); 等离子体浸没离子注入与沉积(PIIID); Raman光谱; AISI440C不锈钢;

D O I：

10.13289/j.issn.1009-6264.2010.02.008

中图分类号：

TG174.44 [金属复层保护];

学科分类号：

080503 ;

摘要：

用等离子体浸没离子注入与沉积(PIIID)复合强化新技术在AISI440C不锈钢表面制备了类金刚石(DLC)碳膜。膜层表面的原子力显微镜(AFM)形貌显示出DLC膜结构致密均匀。Raman光谱分析结果表明,制备的DLC主要是由金刚石键(sp3)和石墨键(sp2)组成的混合无定形碳膜,且sp3键含量大于10%。以纯石墨棒做阴极,C2H2为工作气体条件下合成的DLC薄膜中,sp3键含量总体上较单纯用石墨作阴极而无工作气体条件下合成的DLC薄膜中sp3键含量高。与基体相比,薄膜试样的显微硬度和摩擦磨损性能均得到了较大改善,最大硬度提高88.7%,磨损寿命延长超过4倍。

引用

页码：108 / 112+118 +118

页数：6

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