Diamond-like carbon gradient film prepared by unbalanced magnetron sputtering and plasma immersion ion implantation hybrid technique

被引：19

作者：

Ma, F ^{[1
]}

Li, G

Li, HQ

Ma, HT

Cai, X

机构：

[1] Shanghai Jiao Tong Univ, Key Lab, Minist Educ High Temp Mat & Testing, Shanghai 200030, Peoples R China

[2] Tsinghua Univ, State Key Lab Tribol, Beijing 100084, Peoples R China

来源：

MATERIALS LETTERS | 2002年 / 57卷 / 01期

关键词：

diamond-like carbon; nano-indentation; Raman scattering spectroscopy; AFM;

D O I：

10.1016/S0167-577X(02)00703-6

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Diamond-like carbon (DLC) coatings have been used as solid lubricating coatings in vacuum technology because of their good physical and chemical properties. In this paper, the hybrid technique of unbalanced magnetron sputtering and plasma immersion ion implantation (PIII) was adapted to fabricate diamond-like carbon-based functionally gradient N/TiN/Ti(N,C)/DLC film on the 304 stainless steel substrate. Atomic force microscopy (AFM) was used to analyze the topography and surface roughness of the gradient film. The mechanical properties were evaluated by nano-indentation. The results showed that this DLC gradient film had good qualities as a solid lubricating coating. (C) 2002 Elsevier Science B.V. All rights reserved.

引用

页码：82 / 86

页数：5

共 26 条

[1] INFLUENCE OF DC BIAS VOLTAGE ON THE REFRACTIVE-INDEX AND STRESS OF CARBON-DIAMOND FILMS DEPOSITED FROM A CH4/AR RF PLASMA [J].