共 7 条
[4]
偏振光学[M]. 科学出版社 , 廖延彪著, 2003
[5]
椭圆偏振测量术和偏振光[M]. 科学出版社[美]阿查姆等, 1986
[6]
Development of polarized-light illuminator and its impact .2 Hisashi Nishinaga,Noriaki Tokuda,Soichi Owa et al. SPIE . 2005
[7]
Challenges in high NA, polarization and photoresists .2 B. W. Smith,and J. Cashmore. Proc. of SPIE Int. Soc. Opt. Eng . 2002