CrSiN纳米复合薄膜的摩擦学性能

被引：6

作者：

王海新 ^{[1
]}

耿中荣 ^{[1
]}

张广安 ^{[2
]}

机构：

[1] 兰州交通大学机电工程学院

[2] 中国科学院兰州化学物理研究所固体润滑国家重点实验室

来源：

中国表面工程 | 2013年 / 05期

关键词：

CrSiN; 纳米复合薄膜; 摩擦学性能; 润滑;

D O I：

暂无

中图分类号：

TB383.2 [];

学科分类号：

摘要：

采用中频非平衡反应磁控溅射技术在单晶硅P(111)基材上制备了CrSiN纳米复合薄膜。利用X射线衍射仪(XRD)、X射线光电子能谱仪(XPS)、Kevex能谱仪(EDX)、高分辨率透射电子显微镜(HRTEM)和纳米压痕仪对薄膜的相结构、化学成分组成和力学性能进行了测试分析。利用球-盘式摩擦磨损试验机(UMT-2)考察了薄膜和GCr15钢球对磨的摩擦学性能并采用扫描电镜(SEM)观察磨痕形貌。结果表明:CrN薄膜中Si元素的掺杂改变了薄膜晶体结构,所制备的CrSiN复合薄膜为多相复合结构,即nc-CrN/aSi3N4所组成的纳米晶/非晶复合结构。CrSiN纳米复合薄膜的力学性能均优于CrN薄膜,其硬度均高于CrN薄膜的硬度,其中Si原子数分数为12.6%时薄膜的硬度达到最大,对应纳米晶/非晶复合强化。CrSiN纳米复合薄膜的摩擦因数低于CrN薄膜,具有很好的抗磨损性能,并具有一定的润滑作用。

引用

页码：24 / 30

页数：7

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