Aluminum nitride and alumina composite film fabricated by DC plasma processes[J] . Paul W. Wang,Shixian Sui,Wensheng Wang,William Durrer.Thin Solid Films . 1997 (1)
Aluminum nitride and alumina composite film fabricated by DC plasma processes[J] . Paul W. Wang,Shixian Sui,Wensheng Wang,William Durrer.Thin Solid Films . 1997 (1)