Electrochemical characteristics of alumina dielectric layers

被引：26

作者：

Oh, HJ ^{[1
]}

Jeong, Y

Suh, SJ

Kim, YJ

Chi, CS

机构：

[1] Hanseo Univ, Dept Mat Sci, Seosan 352820, South Korea

[2] Korea Inst Machinery & Mat, Chang Won 641010, South Korea

[3] Sungkyunkwan Univ, Dept Met Engn, Suwon 440746, South Korea

[4] Kookmin Univ, Sch Met & Mat Engn, Seoul 136702, South Korea

来源：

JOURNAL OF PHYSICS AND CHEMISTRY OF SOLIDS | 2003年 / 64卷 / 11期

关键词：

D O I：

10.1016/S0022-3697(03)00236-1

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

The electrochemical characteristics of alumina dielectric layers were studied using a surface roughness factor and an impedance spectroscopy. From the limiting diffusion current method, the surface area factor of the dielectric anodic layer with low electrical conductivity was estimated to be 1.03. As alumina dielectric films on Al have a variable stoichiometry, the electrochemical behavior of Al2O3 layer can be monitored by evaluating an equivalent circuit with Young impedance of dielectric constant with a vertical decay of conductivity. (C) 2003 Elsevier Ltd. All rights reserved.

引用

页码：2219 / 2225

页数：7

共 16 条

[1] A SIMPLE IMPEDANCE SPECTRA METHOD TO MEASURE THE THICKNESS OF NONPOROUS ANODIC OXIDES ON ALUMINUM [J].