Accurate measurements of water vapor transmission through high-performance barrier layers

被引：19

作者：

Brewer, P. J. ^{[1
]}

Goody, B. A. ^{[1
]}

Kumar, Y. ^{[1
]}

Milton, M. J. T. ^{[1
]}

机构：

[1] Natl Phys Lab, Analyt Sci Div, Teddington TW11 0LW, Middx, England

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2012年 / 83卷 / 07期

关键词：

GAS-DIFFUSION BARRIERS; PERMEATION; AL2O3; DEPOSITION; FILMS;

D O I：

10.1063/1.4738775

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

We report a new approach to measuring very low rates of water vapor transmission through high-performance barrier layers, based on detection of the water vapor by cavity ring-down infrared spectroscopy. It provides accurate and traceable measurements with a detection limit for water vapor transmission significantly below 1 x 10(-4) g/m(2)/day. The system is underpinned by dynamic reference standards of water vapor generated between 5 and 2000 nmol/mol with an estimated relative expanded uncertainty of +/- 2%. It has been compared with other methods and demonstrates good comparability. (C) 2012 American Institute of Physics. [http://dx.doi.org/10.1063/1.4738775]

引用

页数：6

共 29 条

[1]

[Anonymous], 2006, 124906 ASTM

[2]

[Anonymous], 1995, GUID EXPR UNC MEAS G

[3] A dynamic gravimetric standard for trace water [J].

Brewer, P. J. ;

Goody, B. A. ;

Woods, P. T. ;

Milton, M. J. T. .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2011, 82 (10)

[4] High-accuracy stable gas flow dilution using an internally calibrated network of critical flow orifices [J].

Brewer, P. J. ;

Goody, B. A. ;

Gillam, T. ;

Brown, R. J. C. ;

Milton, M. J. T. .

MEASUREMENT SCIENCE AND TECHNOLOGY, 2010, 21 (11)

[5] Ultra barrier flexible substrates for flat panel displays [J].

Burrows, PE ;

Graff, GL ;

Gross, ME ;

Martin, PM ;

Shi, MK ;

Hall, M ;

Mast, E ;

Bonham, C ;

Bennett, W ;

Sullivan, MB .

DISPLAYS, 2001, 22 (02) :65-69

[6] Ca test of Al2O3 gas diffusion barriers grown by atomic layer deposition on polymers [J].

Carcia, P. F. ;

McLean, R. S. ;

Reilly, M. H. ;

Groner, M. D. ;

George, S. M. .

APPLIED PHYSICS LETTERS, 2006, 89 (03)

[7] Gas diffusion ultrabarriers on polymer substrates using Al2O3 atomic layer deposition and SiN plasma-enhanced chemical vapor deposition [J].

Carcia, P. F. ;

McLean, R. S. ;

Groner, M. D. ;

Dameron, A. A. ;

George, S. M. .

JOURNAL OF APPLIED PHYSICS, 2009, 106 (02)

[8] Ultralow Water Vapor Permeation Measurement Using Tritium for OLED Displays [J].

Choi, B. I. ;

Nham, H. S. ;

Woo, S. B. ;

Kim, J. C. .

JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 2008, 53 (04) :2179-2184

[9] Evaluation of gas permeation barrier properties using electrical measurements of calcium degradation [J].

Choi, Jin Hwan ;

Kim, Young Min ;

Park, Young Wook ;

Huh, Jin Woo ;

Ju, Byeong Kwon ;

Kim, In Sun ;

Hwang, Hee Nam .

REVIEW OF SCIENTIFIC INSTRUMENTS, 2007, 78 (06)

[10] Definition of encapsulation barrier requirements: A method applied to organic solar cells [J].

Cros, S. ;

de Bettignies, R. ;

Berson, S. ;

Bailly, S. ;

Maisse, P. ;

Lemaitre, N. ;

Guillerez, S. .

SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2011, 95 :S65-S69

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