Biomimetic Antireflective Si Nanopillar Arrays

被引：108

作者：

Xu, Hongbo ^{[1
]}

Lu, Nan ^{[1
]}

Qi, Dianpeng ^{[1
]}

Hao, Juanyuan ^{[1
]}

Gao, Liguo ^{[1
]}

Zhang, Bo ^{[1
]}

Chi, Lifeng ^{[1
,2
,3
]}

机构：

[1] Jilin Univ, State Key Lab Supermol Struct & Mat, Coll Chem, Changchun 130012, Peoples R China

[2] Univ Munster, Inst Phys, D-48149 Munster, Germany

[3] Univ Munster, Ctr Nantechnol CeNTech, D-48149 Munster, Germany

来源：

SMALL | 2008年 / 4卷 / 11期

基金：

中国国家自然科学基金;

关键词：

antireflectivity; biomimetics; nanopillars; reactive ion etching; spherical monolayers;

D O I：

10.1002/smll.200800282

中图分类号：

O6 [化学];

学科分类号：

0703 ;

摘要：

Biomimetic Silicon (Si) nanopillar arrays with antireflection behavior were created based on the combination of self-assembly of polymer spheres into two-dimensional (2D) arrays and reaction-ion etching (RIE). The results indicate that for the Si nanopillars created with 460 nm sphere masks, the aspect ratios of the 3 nanopillar arrays range from 0.79 to 0.9,w here the highest one is created by 290s etching. The Fresnel reflection can be reduced by inserting a layer with an intermediate index between two media. The Si nanopillar arrays have flat tops and grooves and that the residual reflection of 8% is induced by the index changing abruptly at the air/top and groove/air interfaces. The reflectivity is reduced by optimization of the etching conditions and choosing proper spheres to obtain the perfect tapered shapes.

引用

页码：1972 / 1975

页数：4

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