Micro-structured electrochromic device based on poly(3,4-ethylenedioxythiophene)

Recent developments in consumer electronics, e.g. smartphones, tablet PCs or compact cameras, demand the development of very compact, active, optical microsystems. Because of their low power consumption, low operation voltage and cheap fabrication, voltage-controlled electrochromic devices (ECDs) based on polymer materials are promising candidates. However, the broad application of ECDs is still hindered by crucial technological obstacles. In this paper, we address two main issues: the structuring of the electrochromic material (ECM) and its underlying transparent conductive electrode on a microscale and additionally, the assembly of the ECD as an electrochemical cell with the challenges of airtight sealing, appropriate chemical stability, electrical insulation and the necessity of defining a compartment to hold the liquid electrolyte inside the cell. We first introduce a technological sequence consisting of batch processes (UV lithography and dry and wet etching) to render the microscale structuring of the ECM possible. Furthermore, we exploit the outstanding properties of the thick film dry photoresist Ordyl SY 300 to complete the assembly of ECDs with single-layer technology. As a proof of principle, we present the first results of an ECD device based on a poly(3,4-ethylenedioxythiophene) (PEDOT) material that works as an aperture stop with three coaxial segments, each individually controlled by an external voltage.