An Optofluidic Concept for a Tunable Micro-iris

被引：44

作者：

Mueller, Philipp ^{[1
]}

Spengler, Nils ^{[2
]}

Zappe, Hans ^{[1
]}

Moench, Wolfgang ^{[1
]}

机构：

[1] Univ Freiburg, Dept Microsyst Engn IMTEK, D-79110 Freiburg, Germany

[2] Xerox Corp, Palo Alto Res Ctr, Palo Alto, CA 94304 USA

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2010年 / 19卷 / 06期

关键词：

Apertures; capillary forces; microfluidics; micro-optics; optofluidics;

D O I：

10.1109/JMEMS.2010.2079917

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

080906 [电磁信息功能材料与结构]; 082806 [农业信息与电气工程];

摘要：

A tunable aperture stop based on optofluidic technology, which overcomes a number of limitations of comparable micromechanical alternatives, is presented. Relying on the high optical absorption of aqueous pigment dispersions, we demonstrate that optical stops of high contrast may be defined without the need for any movable parts. The highly flexible design is based on photolithographic patterning of dry film resist and allows control of laminar flow in microfluidic chambers exclusively by capillary forces. The functionality of the developed device is shown in transmission measurements and by application of the iris in a basic imaging setup.

引用

页码：1477 / 1484

页数：8

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