Direct-write assembly of three-dimensional photonic crystals:: Conversion of polymer scaffolds to silicon hollow-woodpile structures

被引:167
作者
Gratson, GM
García-Santamaría, F
Lousse, V
Xu, MJ
Fan, SH
Lewis, JA [1 ]
Braun, PV
机构
[1] Univ Illinois, Beckman Inst Adv Sci & Technol, Dept Mat Sci & Engn, Urbana, IL 61801 USA
[2] Univ Illinois, Frederick Seitz Mat Res Lab, Urbana, IL 61801 USA
[3] Univ Illinois, Dept Chem & Biomol Engn, Urbana, IL 61801 USA
[4] Stanford Univ, Dept Elect Engn, Stanford, CA 94305 USA
[5] Fac Univ Notre Dame Paix, Lab Phys Solide, B-5000 Namur, Belgium
关键词
D O I
10.1002/adma.200501447
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
3D Si hollow-woodpile photonic crystals are formed through the direct-write assembly of concentrated polyelectrolyte inks (rods similar to 1 mu m in diameter) followed by a sequential silica/silicon chemical vapor deposition process (see Figure). The direct conversion of 3D polymer microstructures to materials like silicon may enable such applications as photonic materials, low-cost microelectromechanical systems (MEMS), microfluidic networks for heat dissipation, and biological devices.
引用
收藏
页码:461 / +
页数:6
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