Reel-to-reel continuous deposition of epitaxial CeO2 buffer layers on biaxially textured Ni tapes by electron beam evaporation

被引:10
作者
Cui, X [1 ]
List, FA
Kroeger, DM
Goyal, A
Lee, DF
Mathis, J
Specht, ED
Martin, PM
Feenstra, R
Verebelyi, DT
Christen, DK
Paranthaman, M
机构
[1] Oak Ridge Natl Lab, Div Met & Ceram, Oak Ridge, TN 37831 USA
[2] Oak Ridge Natl Lab, Div Solid State, Oak Ridge, TN 37831 USA
[3] Oak Ridge Natl Lab, Chem & Analyt Sci Div, Oak Ridge, TN 37831 USA
关键词
D O I
10.1109/77.784847
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
A reel-to-reel, electron beam evaporation system has been developed to continuously deposit epitaxial CeO2 and other oxide buffer layers on meter-long lengths of biaxially textured Ni tapes. The deposition system includes two interconnected electron beam evaporation chambers and a chamber in which as-rolled Ni tape is irt situ annealed to develop biaxial texture. An integral reel-to-reel system with tension control enables motion of the tape with little or no plastic deformation. When depositing epitaxial oxides on Ni, the formation of unfavorably oriented NiO is difficult to avoid. Oxide free, {100}<100> oriented Ni tapes are prepared by control of the partial pressures of H-2, H2O and O-2 during Ni annealing. X-ray phi-scans have been performed as a function of length to determine the crystallographic consistency of the epitaxial CeO2 over length. Results of SEM examinations of the CeO2 buffer layer microstructure are presented. Results for YBCO films deposited on short segments of these buffered substrates are summarized.
引用
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页码:1967 / 1970
页数:4
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