Nanoscale investigation of fatigue effects in Pb(Zr,Ti)O-3 films

被引：230

作者：

Gruverman, A ^{[1
]}

Auciello, O ^{[1
]}

Tokumoto, H ^{[1
]}

机构：

[1] MCNC,DIV ELECT TECHNOL,RES TRIANGLE PK,NC 27709

来源：

APPLIED PHYSICS LETTERS | 1996年 / 69卷 / 21期

关键词：

D O I：

10.1063/1.117957

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Scanning force microscopy has been used to perform a comparative nanoscale study of domain structures and switching behavior of Pb(ZrxTi1-x)O-3 (PZT) thin films integrated into heterostructures with different electrodes. The study revealed a significant difference between polarization state of as-deposited PZT films on RuO2 and Pt electrodes. The PZT/RuO2 films exhibit polydomain crystallites and show almost symmetric switching behavior, while the PZT/Pt films are mainly in a single polarity state and exhibit highly asymmetric piezoelectric hysteresis loops. Formation of unswitchable polarization within the grains of submicron size as a result of fatigue process was directly observed. (C) 1996 American Institute of Physics.

引用

页码：3191 / 3193

页数：3

共 13 条

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