The reliability of amorphous silicon thin film transistors for LCD under DC and AC stresses

被引:12
作者
Cheng, HC [1 ]
Huang, CY [1 ]
Lin, JW [1 ]
Kung, JJH [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Elect Engn, Hsinchu, Taiwan
来源
1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS | 1998年
关键词
D O I
10.1109/ICSICT.1998.786201
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
In this paper, hydrogenated amorphous silicon and polycrystalline silicon thin film transistors have been stressed with various conditions including DC and AC. The charge trapping and defect state creation are the two mechanisms to degrade the transfer characteristics of the TFTs. For a-Si.H TFTs, the charge trapping occurs at high silicon content of silicon nitride (SiNx) gate dielectrics or performs at high gate electrical field. Defect stale creation dominates at low hydrogen concentration in a-Si:H. At the performance of AC signal, the degradation of transfer curves is associated with bias, frequency, and duty cycle. The characteristics of a-Si:PI TFTs shift more with increasing bias voltage and duty cycle. For the frequency effect, the transfer characteristics of a-Si:H TFTs decrease with increasing AC frequency under negative AC signal stress, however, they are independent of the frequency under positive AC signal stress.
引用
收藏
页码:834 / 837
页数:4
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