Evidence of hydrogen-boron interactions in diamond from deuterium diffusion and infrared spectroscopy experiments

被引:10
作者
Chevallier, J
Lusson, A
Theys, B
Deneuville, A
Gheeraert, E
机构
[1] CNRS, Lab Phys Solides Bellevue, F-92195 Meudon, France
[2] CNRS, Etud Proprietes Elect Solides Lab, F-38042 Grenoble, France
关键词
diamond; doping; hydrogen; diffusion; infrared absorption;
D O I
10.1016/S0925-9635(98)00326-4
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
We report on the first experimental evidence of hydrogen-boron interactions in boron-doped diamond. Deuterium diffusion studies in homoepitaxial B-doped diamond films reveal that hydrogen diffusion is limited by the B concentration and is characterized by a low effective diffusion activation energy. Infrared spectroscopy experiments show that boron acceptor electronic transitions disappear under hydrogenation. These results are consistent with hydrogen ionization and diffusion of fairly mobile H+ which form pairs with B-. (C) 1999 Elsevier Science S.A. All rights reserved.
引用
收藏
页码:278 / 282
页数:5
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