A miniaturised sensor for deep hole diameter measurement

被引：17

作者：

Tian, GY ^{[1
]}

Zhao, ZX ^{[1
]}

Baines, RW ^{[1
]}

Corcoran, P ^{[1
]}

机构：

[1] Univ Derby, Colour & Imaging Inst, Derby DE22 3HL, England

来源：

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING | 1999年 / 23卷 / 04期

关键词：

miniaturised sensor; deep hole measurement; frequency output; chip coils; eddy current sensor;

D O I：

10.1016/S0141-6359(99)00014-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A miniaturised displacement senor for deep hole measurement is reported in this paper. By exploiting the induced eddy current effects detected by chip coils, the sensor generates a 'digital' signal. The sensor chip coil can be manufactured by the similar processes to those used for manufacturing a printed circuit board (PCB) which allows them to be miniaturised. The paper elaborates on the construction and mechanism by which the displacement is directly transferred to a frequency output. It also reports on the transducer, which uses two contact probes for transmitting the displacement to a noncontact sensing element. Experimental results demonstrate the stability, linearity, measurement range and accuracy of the sensor system. (C) 1999 Elsevier Science Inc. All rights reserved.

引用

页码：236 / 242

页数：7

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