Structural and morphologic evolution of Pt/Ba0.7Sr0.3TiO3/Pt capacitors with annealing processes

被引：14

作者：

Qin, YL

Jia, CL

Urban, K

Liedtke, R

Waser, R

机构：

[1] Forschungszentrum Julich, Inst Festkorperforsch, D-52425 Julich, Germany

[2] Rhein Westfal TH Aachen, Inst Werkstoffe Elektrotech, D-52056 Aachen, Germany

来源：

APPLIED PHYSICS LETTERS | 2002年 / 80卷 / 15期

关键词：

D O I：

10.1063/1.1469683

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The microstructure and chemistry of the as-grown, the postannealed and the forming-gas-atmosphere-treated Pt/Ba0.7Sr0.3TiO3/Pt capacitors are studied by means of high-resolution transmission electron microscopy and energy-disperse x-ray spectroscopy. It is found that the annealed Ba0.7Sr0.3TiO3 films have larger grain size and more smooth top film-electrode interfaces. High-resolution images reveal the presence of disordered or amorphous regions at the interfaces in the Ba0.7Sr0.3TiO3 film heated in the forming-gas atmosphere. These regions show a higher Ti/(Ba+Sr) ratio than the grain matrix. The effects of these amorphous regions on the electrical properties of Ba0.7Sr0.3TiO3 films are discussed. (C) 2002 American Institute of Physics.

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页码：2728 / 2730

页数：3

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