Two methods for the immobilisation of enzymes on silicon-based so-called electrolyte-insulator-semiconductor (EIS) structures are suggested. These EIS structures are used as a basis for potentiometric biosensors. In the first method, heterobifunctional cross-linker molecules are employed to covalently bind enzymes to these capacitive layer structures which possess a planar surface that contains amine groups. Porous EIS sensors which, in comparison to planar sensors, exhibit an enlarged surface area, are used in the second method. For the first time, pH-sensitive Si(3)N(4) was deposited on the walls and bottoms of the SiO(2)-covered pores. Here, a large amount of enzyme molecules can adsorptively be bound inside the porous structure. Penicillinase is used as a model enzyme. Capacitance-Voltage and Constant Capacitance measurements are performed in order to examine the respective penicillin sensor responses and thus to validate both immobilisation methods. Whereas the sensitivity of the sensors prepared by both methods is nearly identical for low penicillin concentrations up to around 0.25 mM, a difference of the calibration curves in the higher concentration range indicates a larger amount of immobilised enzyme in the case of the porous structures. (C) 1999 Elsevier Science B.V. All rights reserved.