Applications of the cavity ring-down technique to a large-area rf-plasma reactor

被引：46

作者：

Grangeon, F ^{[1
]}

Monard, C

Dorier, JL

Howling, AA

Hollenstein, C

Romanini, D

Sadeghi, N

机构：

[1] Ecole Polytech Fed Lausanne, Ctr Rech Phys Plasmas, CH-1015 Lausanne, Switzerland

[2] Univ Grenoble 1, Spectrometrie Phys Lab, UMR 5588, F-38402 St Martin Dheres, France

来源：

PLASMA SOURCES SCIENCE & TECHNOLOGY | 1999年 / 8卷 / 03期

关键词：

D O I：

10.1088/0963-0252/8/3/315

中图分类号：

O35 [流体力学]; O53 [等离子体物理学];

学科分类号：

070204 ; 080103 ; 080704 ;

摘要：

The cavity ring-down technique is applied to an industrial-scale radio-frequency (rf) plasma reactor for the measurement of the density and spatial profile of negative ions in pure oxygen and hydrogen rf plasmas, and for the detection of nanometric particles in argon-silane plasmas. The real-time observation of powder formation is demonstrated to be feasible by the cavity ring-down technique. An observed plasma-induced spurious drift of the ring-down time is also studied and related to water desorption from the reactor walls and electrodes which is re-adsorbed on the mirror surfaces.

引用

页码：448 / 456

页数：9

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