Effect of surface oxide layers on deuterium permeation through stainless steels with reference to outgassing reduction in ultra- to extremely high vacuum

被引:21
作者
Ishikawa, Y
Yoshimura, T
Arai, M
机构
[1] Mech. Eng. Research Laboratory, Hitachi Ltd, Tsuchiura, 300
关键词
D O I
10.1016/0042-207X(95)00251-0
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Hydrogen is a dominant outgassing species from stainless steel vacuum chambers in ultra- to extremely high vacuum. Oxidation of stainless steel surfaces has been known to reduce the outgassing. The oxide layer formed on the stainless steel surface is expected to serve as a diffusion barrier for hydrogen diffusing from the bulk. In the present study the effects of oxidation on the outgassing rate, on hydrogen thermal desorption spectra, on surface contamination and on deuterium permeation and diffusion characteristics through the stainless steels are summarized. Discussion is given to the role of the surface oxide layer in outgassing reduction as well as to the effect of thickness and chemical compositions on reduction in hydrogen permeability and diffusion. The surface oxide formed in the present study appears to serve as the diffusion barrier for hydrogen and is found to decrease the deuterium permeability to 1/2-1/3 of the unoxidized one by lowering the diffusion coefficient. The most effective oxide is proposed to be Cr-rich oxide with 100-200 Angstrom thickness.
引用
收藏
页码:357 / 361
页数:5
相关论文
共 31 条
[1]  
BRUZZONI P, 1992, CORROS SCI, V32, P1797
[2]  
DOBROZEMSKY R, 1974, ELECT FIS APLI, V17, P235
[3]   CORRELATION OF OUTGASSING OF STAINLESS-STEEL AND ALUMINUM WITH VARIOUS SURFACE TREATMENTS [J].
DYLLA, HF ;
MANOS, DM ;
LAMARCHE, PH .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (05) :2623-2636
[4]   THE INFLUENCE ON HYDROGEN PERMEATION THROUGH STEEL OF SURFACE OXIDE LAYERS AND THEIR CHARACTERIZATION USING NUCLEAR-REACTIONS [J].
EARWAKER, LG ;
ROSS, DK ;
FARR, JPG ;
CHEETHAM, JL .
IEEE TRANSACTIONS ON NUCLEAR SCIENCE, 1981, 28 (02) :1848-1850
[5]   HYDROGEN IN 304 STEEL - DIFFUSION, PERMEATION AND SURFACE-REACTION [J].
GRANT, DM ;
CUMMINGS, DL ;
BLACKBURN, DA .
JOURNAL OF NUCLEAR MATERIALS, 1987, 149 (02) :180-191
[6]   HYDROGEN IN 316 STEEL - DIFFUSION, PERMEATION AND SURFACE-REACTION [J].
GRANT, DM ;
CUMMINGS, DL ;
BLACKBURN, DA .
JOURNAL OF NUCLEAR MATERIALS, 1988, 152 (2-3) :139-145
[7]   PERFORMANCE OF VACUUM COMPONENTS OPERATING AT 1X10-11 TORR [J].
HALAMA, HJ .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1979, 16 (02) :717-719
[8]   IMPORTANCE OF THE SURFACE OXIDE LAYER IN THE REDUCTION OF OUTGASSING FROM STAINLESS-STEELS [J].
ISHIKAWA, Y ;
YOSHIMURA, T .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1995, 13 (04) :1847-1852
[9]   OUTGASSING RATE OF SOME AUSTENITIC STAINLESS-STEELS [J].
ISHIKAWA, Y ;
KOGUCHI, Y ;
ODAKA, K .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1991, 9 (02) :250-253
[10]   REDUCTION OF OUTGASSING FROM STAINLESS SURFACES BY SURFACE OXIDATION [J].
ISHIKAWA, Y ;
ODAKA, K .
VACUUM, 1990, 41 (7-9) :1995-1997