OUTGASSING RATE OF SOME AUSTENITIC STAINLESS-STEELS

被引:12
作者
ISHIKAWA, Y
KOGUCHI, Y
ODAKA, K
机构
[1] MechanicalEngineering Research Laboratory, Hitachi Ltd., 502 Kandatsu, Tsuchiura-shi
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS | 1991年 / 9卷 / 02期
关键词
D O I
10.1116/1.577529
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Outgassing rates were measured and compared for 304L, 316L, and 316LN stainless steels in fully degassed condition produced by repeated pumpdown and baking. In addition, thermal desorption characteristics and surface compostion were measured. In particular, the effect of grade, vacuum remelting, and prebaking is discussed. The grade itself does not appear to affect the outgassing rate significantly, while vacuum remelting reduces hydrogen in the steel, thus giving lower outgassing rate than commercially available steel. However the effect of prebaking at 450-degrees-C appears more pronounced on reduction of diffusive outgassing of hydrogen than that of vacuum remelting. Application of prebaking to the vacuum remelted steel produces the extremely low outgassing surface, as low as 1.3 x 10(-10) Pa m3 s-1 m-2 by baking at 150-degrees-C for 14 h.
引用
收藏
页码:250 / 253
页数:4
相关论文
共 10 条
[1]   EFFECT OF CLEANING TECHNIQUE ON OUTGASSING RATE OF 18/9/1 STAINLESS STEEL [J].
BARTON, RS ;
GOVIER, RP .
VACUUM, 1970, 20 (01) :1-&
[2]   REDUCTION OF STAINLESS-STEEL OUTGASSING IN ULTRA-HIGH VACUUM [J].
CALDER, R ;
LEWIN, G .
BRITISH JOURNAL OF APPLIED PHYSICS, 1967, 18 (10) :1459-&
[3]  
ISHIKAWA Y, IN PRESS VACUUM
[4]  
ISHIKAWA Y, 1989, J VAC SOC JPN, V32, P443
[5]   IMPURITY SEGREGATION OF STAINLESS-STEEL STUDIED BY ATOM-PROBE AND AUGER-ELECTRON SPECTROSCOPY [J].
KOGUCHI, Y ;
TAKAHASHI, K ;
ISHIKAWA, Y .
JOURNAL DE PHYSIQUE, 1987, 48 (C-6) :411-416
[6]  
NUVOLONE R, 1977, J VAC SCI TECHNOL, V16, P717
[7]   EFFECT OF BAKING TEMPERATURE AND AIR EXPOSURE ON THE OUTGASSING RATE OF TYPE 316L STAINLESS-STEEL [J].
ODAKA, K ;
ISHIKAWA, Y ;
FURUSE, M .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1987, 5 (05) :2902-2906
[8]   A STUDY OF SURFACE SEGREGATION OF A TYPE 304 STAINLESS-STEEL BY ATOM-PROBE [J].
TAKAHASHI, K ;
ISHIKAWA, Y ;
YOSHIMURA, T ;
NISHIKAWA, O .
JOURNAL DE PHYSIQUE, 1986, 47 (C-7) :233-237
[9]   A HIGH-PERFORMANCE MOLECULAR-BEAM EPITAXY SYSTEM EQUIPPED WITH THE AUTOMATIC SUBSTRATE TRANSPORT MECHANISM [J].
UEDA, S ;
KAMOHARA, H ;
ISHIKAWA, Y ;
TAMURA, N ;
KATOO, S ;
SHIRAKI, Y .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1986, 4 (03) :602-605
[10]   OUTGASSING CHARACTERISTICS OF STAINLESS STEEL AND ALUMINUM WITH DIFFERENT SURFACE TREATMENTS [J].
YOUNG, JR .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1969, 6 (03) :398-&