Motorola and MEMMS: The way up to a surface micromachined accelerometer

被引：4

作者：

Delpoux, A

机构：

来源：

MICROELECTRONICS JOURNAL | 1997年 / 28卷 / 04期

关键词：

D O I：

10.1016/S0026-2692(96)00076-6

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

After a short history of sensor development at Motorola, this article details the technology of the surface micromachined accelerometer, its high volume application and some possible further developments. (C) 1997 Elsevier Science Ltd.

引用

页码：381 / 387

页数：7

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