High-mobility ultrathin semiconducting films prepared by spin coating

被引:444
作者
Mitzi, DB [1 ]
Kosbar, LL [1 ]
Murray, CE [1 ]
Copel, M [1 ]
Afzali, A [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1038/nature02389
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The ability to deposit and tailor reliable semiconducting films ( with a particular recent emphasis on ultrathin systems) is indispensable for contemporary solid-state electronics(1-3\). The search for thin-film semiconductors that provide simultaneously high carrier mobility and convenient solution-based deposition is also an important research direction, with the resulting expectations of new technologies ( such as flexible or wearable computers, large-area high-resolution displays and electronic paper) and lower-cost device fabrication(4-11). Here we demonstrate a technique for spin coating ultrathin (similar to50 Angstrom), crystalline and continuous metal chalcogenide films, based on the low-temperature decomposition of highly soluble hydrazinium precursors. We fabricate thin-film field-effect transistors (TFTs) based on semiconducting SnS2-xSex films, which exhibit n-type transport, large current densities (> 10(5) A cm(-2)) and mobilities greater than 10 cm(2) V-1 s(-1) - an order of magnitude higher than previously reported values for spin-coated semiconductors. The spin-coating technique is expected to be applicable to a range of metal chalcogenides, particularly those based on main group metals, as well as for the fabrication of a variety of thin-film-based devices (for example, solar cells(12), thermoelectrics(13) and memory devices(14)).
引用
收藏
页码:299 / 303
页数:5
相关论文
共 30 条
[1]   High-performance, solution-processed organic thin film transistors from a novel pentacene precursor [J].
Afzali, A ;
Dimitrakopoulos, CD ;
Breen, TL .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2002, 124 (30) :8812-8813
[2]   THIN-FILM CDS/CDTE SOLAR-CELL WITH 15.8-PERCENT EFFICIENCY [J].
BRITT, J ;
FEREKIDES, C .
APPLIED PHYSICS LETTERS, 1993, 62 (22) :2851-2852
[3]   Polysilicon thin film transistors fabricated on low temperature plastic substrates [J].
Carey, PG ;
Smith, PM ;
Theiss, SD ;
Wickboldt, P .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 1999, 17 (04) :1946-1949
[4]  
Dimitrakopoulos CD, 2002, ADV MATER, V14, P99, DOI 10.1002/1521-4095(20020116)14:2<99::AID-ADMA99>3.0.CO
[5]  
2-9
[6]   Low-voltage organic transistors on plastic comprising high-dielectric constant gate insulators [J].
Dimitrakopoulos, CD ;
Purushothaman, S ;
Kymissis, J ;
Callegari, A ;
Shaw, JM .
SCIENCE, 1999, 283 (5403) :822-824
[7]   FUNDAMENTAL OPTICAL ABSORPTION IN SNS2 AND SNSE2 [J].
DOMINGO, G ;
ITOGA, RS ;
KANNEWURF, CR .
PHYSICAL REVIEW, 1966, 143 (02) :536-+
[8]   High-performance thin-film transistors using semiconductor nanowires and nanoribbons [J].
Duan, XF ;
Niu, CM ;
Sahi, V ;
Chen, J ;
Parce, JW ;
Empedocles, S ;
Goldman, JL .
NATURE, 2003, 425 (6955) :274-278
[9]   CRYSTAL-STRUCTURE OF TETRAPOTASSIUM HEXASELENODISTANNATE, K4SN2SE6 [J].
EISENMANN, B ;
HANSA, J .
ZEITSCHRIFT FUR KRISTALLOGRAPHIE, 1993, 203 :299-300
[10]   Ultrathin organic films grown by organic molecular beam deposition and related techniques [J].
Forrest, SR .
CHEMICAL REVIEWS, 1997, 97 (06) :1793-1896