High-mobility ultrathin semiconducting films prepared by spin coating

被引:444
作者
Mitzi, DB [1 ]
Kosbar, LL [1 ]
Murray, CE [1 ]
Copel, M [1 ]
Afzali, A [1 ]
机构
[1] IBM Corp, Thomas J Watson Res Ctr, Yorktown Hts, NY 10598 USA
关键词
D O I
10.1038/nature02389
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The ability to deposit and tailor reliable semiconducting films ( with a particular recent emphasis on ultrathin systems) is indispensable for contemporary solid-state electronics(1-3\). The search for thin-film semiconductors that provide simultaneously high carrier mobility and convenient solution-based deposition is also an important research direction, with the resulting expectations of new technologies ( such as flexible or wearable computers, large-area high-resolution displays and electronic paper) and lower-cost device fabrication(4-11). Here we demonstrate a technique for spin coating ultrathin (similar to50 Angstrom), crystalline and continuous metal chalcogenide films, based on the low-temperature decomposition of highly soluble hydrazinium precursors. We fabricate thin-film field-effect transistors (TFTs) based on semiconducting SnS2-xSex films, which exhibit n-type transport, large current densities (> 10(5) A cm(-2)) and mobilities greater than 10 cm(2) V-1 s(-1) - an order of magnitude higher than previously reported values for spin-coated semiconductors. The spin-coating technique is expected to be applicable to a range of metal chalcogenides, particularly those based on main group metals, as well as for the fabrication of a variety of thin-film-based devices (for example, solar cells(12), thermoelectrics(13) and memory devices(14)).
引用
收藏
页码:299 / 303
页数:5
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