Effects of O vacancies and C doping on dielectric properties of ZrO2:: A first-principles study

被引:45
作者
Dutta, Gargi
Hembram, K. P. S. S.
Rao, G. Mohan
Waghmare, Umesh V.
机构
[1] Jawaharlal Nehru Ctr Adv Sci Res, Theoret Sci Unit, Bangalore 560064, Karnataka, India
[2] Jawaharlal Nehru Ctr Adv Sci Res, Chem & Phys Mat Unit, Bangalore 560064, Karnataka, India
[3] Indian Inst Sci, Dept Instrumentat, Bangalore 560012, Karnataka, India
关键词
D O I
10.1063/1.2388146
中图分类号
O59 [应用物理学];
学科分类号
摘要
The authors determine electronic properties, structural stability, and dielectric response of zirconia (ZrO2) with oxygen vacancies (O vacancies) and carbon doping (C doping) using first-principles density functional theory calculations based on pseudopotentials and a plane wave basis. They find significantly enhanced static dielectric response in zirconia with oxygen vacancies arising from a softened phonon mode. They also find that effects of carbon doping on the dielectric response are anisotropic. (c) 2006 American Institute of Physics.
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页数:3
相关论文
共 19 条
[1]   Material and electrical characterization of carbon-doped Ta2O5 films for embedded dynamic random access memory applications [J].
Chu, K ;
Chang, JP ;
Steigerwald, ML ;
Fleming, RM ;
Opila, RL ;
Lang, DV ;
Van Dover, RB ;
Jones, CDW .
JOURNAL OF APPLIED PHYSICS, 2002, 91 (01) :308-316
[2]   Electronic structure and electron energy-loss spectroscopy of ZrO2 zirconia -: art. no. 245116 [J].
Dash, LK ;
Vast, N ;
Baranek, P ;
Cheynet, MC ;
Reining, L .
PHYSICAL REVIEW B, 2004, 70 (24) :1-17
[3]  
Demkov A.A., 2005, MAT FUNDAMENTALS GAT
[4]   Theoretical evaluation of zirconia and hafnia as gate oxides for Si microelectronics [J].
Fiorentini, V ;
Gulleri, G .
PHYSICAL REVIEW LETTERS, 2002, 89 (26) :266101/1-266101/4
[5]   Structure and electrical levels of point defects in monoclinic zirconia [J].
Foster, AS ;
Sulimov, VB ;
Gejo, FL ;
Shluger, AL ;
Nieminen, RM .
PHYSICAL REVIEW B, 2001, 64 (22)
[6]   Fast radix 2, 3, 4, and 5 kernels for fast Fourier transformations on computers with overlapping multiply-add instructions [J].
Goedecker, S .
SIAM JOURNAL ON SCIENTIFIC COMPUTING, 1997, 18 (06) :1605-1611
[7]   First-principles computation of material properties: the ABINIT software project [J].
Gonze, X ;
Beuken, JM ;
Caracas, R ;
Detraux, F ;
Fuchs, M ;
Rignanese, GM ;
Sindic, L ;
Verstraete, M ;
Zerah, G ;
Jollet, F ;
Torrent, M ;
Roy, A ;
Mikami, M ;
Ghosez, P ;
Raty, JY ;
Allan, DC .
COMPUTATIONAL MATERIALS SCIENCE, 2002, 25 (03) :478-492
[8]  
HEMBRAM KPS, 2003, P IWPSD, P337
[9]   Low-temperature polymorphs of ZrO2 and HfO2:: A density-functional theory study -: art. no. 144107 [J].
Jaffe, JE ;
Bachorz, RA ;
Gutowski, M .
PHYSICAL REVIEW B, 2005, 72 (14)
[10]   Thermal stability of ultrathin ZrO2 films prepared by chemical vapor deposition on Si(100) [J].
Jeon, TS ;
White, JM ;
Kwong, DL .
APPLIED PHYSICS LETTERS, 2001, 78 (03) :368-370