Pinhole imaging in magnetic tunnel junctions

被引:8
作者
Allen, D
Schad, R [1 ]
Zangari, G
Zana, I
Yang, D
Tondra, M
Wang, DX
机构
[1] Univ Alabama, Dept Phys, Tuscaloosa, AL 35487 USA
[2] Univ Alabama, Ctr Mat Informat Technol, Tuscaloosa, AL 35487 USA
[3] Univ Alabama, Dept Met & Mat Engn, Tuscaloosa, AL 35487 USA
[4] Nonvolatile Elect, Eden Prairie, MN 55344 USA
关键词
D O I
10.1063/1.373290
中图分类号
O59 [应用物理学];
学科分类号
摘要
Magnetic tunnel junctions may experience failure due to local short cuts in the insulating layer of such devices. The thicknesses of the insulating layers need to be reduced, which will likely make this problem more prevalent. To develop low resistance magnetic tunnel junctions, the density of pinholes must be analyzed. Using the electrodeposition of copper, we have developed a method for the imaging of pinholes. With the selective nucleation of copper at pinhole sites, structures are formed which can be visualized by conventional microscopy techniques. The potential applied for electrodeposition might cause dielectric breakdown of weak spots in the insulator layer. Variation of the applied voltage will allow identification of such sources of device failure. (C) 2000 American Institute of Physics. [S0021-8979(00)54108-5].
引用
收藏
页码:5188 / 5190
页数:3
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