GaAs/AlGaAs-heterostructures;
nano-electromechanical systems (NEMS);
D O I:
10.1016/S1386-9477(01)00397-6
中图分类号:
TB3 [工程材料学];
学科分类号:
0805 ;
080502 ;
摘要:
We present magnetotransport measurements on freely Suspended two-dimensional electron gases. Samples are prepared from GaAs/AlGaAs-heterostructures containing an additional sacrificial layer. The electronic properties of the system are characterized in standard magnetotransport measurements whereas the mechanical degrees of freedom are investigated in radio frequency resonance experiments. The interplay of both can be exploited for ultrasensitive displacement detection. (C) 2002 Elsevier Science B.V. All rights reserved.