[1] Tsinghua Univ, Ctr Mech & Mat, Beijing, Peoples R China
[2] Tsinghua Univ, Ctr Flexible Elect Technol, Beijing, Peoples R China
[3] Tsinghua Univ, Dept Engn Mech, AML, Beijing, Peoples R China
[4] Univ Illinois, Dept Mech Sci & Engn, Urbana, IL USA
[5] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[6] Univ Illinois, Int Inst Carbon Neutral Energy Res I2CNER, Micro & Nanotechnol Lab, Dept Elect & Comp Engn, Urbana, IL USA
[7] Peking Univ, Natl Key Lab Sci & Technol Micro Nano Fabricat, Beijing, Peoples R China
[8] Univ Missouri, Dept Chem Engn, Columbia, MO 65211 USA
[9] Univ Missouri, Dept Mech & Aerosp Engn, Columbia, MO 65211 USA
[10] Northwestern Univ, Dept Civil & Environm Engn, Evanston, IL 60208 USA
[11] Northwestern Univ, Dept Mech Engn, Evanston, IL 60208 USA
[12] Northwestern Univ, Dept Mat Sci & Engn, Evanston, IL 60208 USA
[13] Pusan Natl Univ, Dept Mat Sci & Engn, Busan, South Korea
[14] Beijing Inst Technol, Inst Adv Struct Technol, Beijing, Peoples R China
[15] Beijing Inst Technol, Beijing Key Lab Lightweight Multifunct Composite, Beijing, Peoples R China
[16] Northwestern Univ, Dept Biomed Engn, Evanston, IL 60208 USA
[17] Northwestern Univ, Dept Neurol Surg, Evanston, IL 60208 USA
[18] Northwestern Univ, Dept Chem, Evanston, IL 60208 USA
[19] Northwestern Univ, Dept Elect Engn & Comp Sci, Evanston, IL 60208 USA
[20] Northwestern Univ, Ctr Biointegrated Elect, Evanston, IL 60208 USA
[21] Northwestern Univ, Simpson Querrey Inst Bionanotechnol, Evanston, IL 60208 USA