Preparation and piezoelectricity of c-axis oriented LiNbO3 thin films on polycrystalline Si3N4 substrates

C-axis orientation of LiNbO3 thin films prepared on polycrystalline Si3N4 substrates by RF magnetron sputtering was optimized by analysis pf the variance. The LiNbO3 thin film was completely oriented in the c-axis direction. Using an interdigital transducer fabricated on the him, a resonance was observed at a frequency of 800 MHz, which showed that the film exhibited piezoelectric properties. It was proved that a c-axis-oriented LiNbO3 thin film can be used to detect mechanical impact.