Electrostatically actuated micromechanical switches

被引：27

作者：

Majumder, S

McGruer, NE

Zavracky, PM

机构：

[1] Electrical and Computer Engineering, Northeastern University, Boston

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A | 1997年 / 15卷 / 03期

关键词：

D O I：

10.1116/1.580602

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Micromechanical switches and relays realized by a simple surface micromachining process are presented. The devices use a nickel cantilever beam and gold-to-gold electrical contact, and are electrostatically actuated. They have lifetimes exceeding 10(9) cycles, and a current handling capability of 150 mA. (C) 1997 American Vacuum Society.

引用

页码：1246 / 1249

页数：4

共 9 条

[1]

DRAKE J, 1995, UNPUB TRANSD 95 EUR

[2] INTEGRATED-CIRCUIT COMPATIBLE ELECTROSTATIC POLYSILICON MICRORELAYS [J].