Phase-step calibration for phase-stepped interferometry

被引:38
作者
van Brug, H [1 ]
机构
[1] Delft Univ Technol, Appl Phys Lab, Opt Res Grp, NL-2628 CJ Delft, Netherlands
关键词
D O I
10.1364/AO.38.003549
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A novel method to set the proper phase steps, as used in phase-stepped interferometry, is presented. It is indicated how and when this method can be used. With only two images one can deduce the relative phase step between them by calculating the correlation between the two images. The error of the proposed method is shown to be smaller than 0.1%. (C) 1999 Optical Society of America. OCIS codes: 120.2650, 120.3180, 120.5070.
引用
收藏
页码:3549 / 3555
页数:7
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