The structural evolution of nanocrystalline diamond films synthesized by r.f. PECVD

被引：7

作者：

Liang, XB ^{[1
]}

Wang, L ^{[1
]}

Yang, DR ^{[1
]}

机构：

[1] Zhejiang Univ, State Key Lab Silicon Mat, Hangzhou 310027, Peoples R China

来源：

MATERIALS LETTERS | 2006年 / 60卷 / 06期

基金：

中国国家自然科学基金;

关键词：

diamond film; PECVD; low temperature; nanostructure;

D O I：

10.1016/j.matlet.2005.10.001

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Nanocrystalline diamond films (NDFs) have been deposited using radio-frequency plasma enhanced chemical vapor deposition (r.f-PECVD) at temperature as low as 500 degrees C. The CO/H-2 ratio has been shown to exert a profound effect on the structure configuration of the NDFs. The nanoscale structures of the films have been shown to evolve from columnar structure to grainy structure with the increase of the CO/H-2 ratio from 12:1 to 20:1. Such evolution is suggested to be the result of the enhanced secondary nucleation process. It gives an insight of the nucleation and growth process of NDFs and provides useful information on the optimal control of NDFs deposition. (c) 2005 Elsevier B.V. All rights reserved.

引用

页码：730 / 733

页数：4

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