Nanomechanical resonant structures as tunable passive modulators of light

被引：20

作者：

Sekaric, L ^{[1
]}

Zalalutdinov, M ^{[1
]}

Turner, SW ^{[1
]}

Zehnder, AT ^{[1
]}

Parpia, JM ^{[1
]}

Craighead, HG ^{[1
]}

机构：

[1] Cornell Ctr Mat Res, Ithaca, NY 14853 USA

来源：

APPLIED PHYSICS LETTERS | 2002年 / 80卷 / 19期

关键词：

Laser excitation - Light modulators;

D O I：

10.1063/1.1479209

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We report on the optical parametric excitation of silicon nanomechanical resonant structures. The threshold laser power needed to set these structures into self-oscillation was estimated to be around 70 muW. We measured resonant frequencies of up to 38 MHz by optical excitation; this method should extend to much higher frequencies. Under optical amplification of motion, the spectral response at resonance narrowed to the equivalent of a mechanical quality factor >20 000 at room temperature. These structures act as frequency tunable passive modulators of light, requiring no additional drive. (C) 2002 American Institute of Physics.

引用

页码：3617 / 3619

页数：3

共 15 条

[1] Fabrication of high frequency nanometer scale mechanical resonators from bulk Si crystals [J].