Nanomechanical resonant structures as tunable passive modulators of light

被引:20
作者
Sekaric, L [1 ]
Zalalutdinov, M [1 ]
Turner, SW [1 ]
Zehnder, AT [1 ]
Parpia, JM [1 ]
Craighead, HG [1 ]
机构
[1] Cornell Ctr Mat Res, Ithaca, NY 14853 USA
关键词
Laser excitation - Light modulators;
D O I
10.1063/1.1479209
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report on the optical parametric excitation of silicon nanomechanical resonant structures. The threshold laser power needed to set these structures into self-oscillation was estimated to be around 70 muW. We measured resonant frequencies of up to 38 MHz by optical excitation; this method should extend to much higher frequencies. Under optical amplification of motion, the spectral response at resonance narrowed to the equivalent of a mechanical quality factor >20 000 at room temperature. These structures act as frequency tunable passive modulators of light, requiring no additional drive. (C) 2002 American Institute of Physics.
引用
收藏
页码:3617 / 3619
页数:3
相关论文
共 15 条
[11]  
Timoshenko S., 1974, VIBRATION PROBLEMS E, P453
[12]   MECHANICAL LIGHT-MODULATOR FABRICATED ON A SILICON CHIP USING SIMOX TECHNOLOGY [J].
WISZNIEWSKI, WR ;
COLLINS, RE ;
PAILTHOORPE, BA .
SENSORS AND ACTUATORS A-PHYSICAL, 1994, 43 (1-3) :170-174
[13]   Quality factors in micron- and submicron-thick cantilevers [J].
Yasumura, KY ;
Stowe, TD ;
Chow, EM ;
Pfafman, T ;
Kenny, TW ;
Stipe, BC ;
Rugar, D .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2000, 9 (01) :117-125
[14]   Autoparametric optical drive for micromechanical oscillators [J].
Zalalutdinov, M ;
Zehnder, A ;
Olkhovets, A ;
Turner, S ;
Sekaric, L ;
Ilic, B ;
Czaplewski, D ;
Parpia, JM ;
Craighead, HG .
APPLIED PHYSICS LETTERS, 2001, 79 (05) :695-697
[15]   Optically pumped parametric amplification for micromechanical oscillators [J].
Zalalutdinov, M ;
Olkhovets, A ;
Zehnder, A ;
Ilic, B ;
Czaplewski, D ;
Craighead, HG ;
Parpia, JM .
APPLIED PHYSICS LETTERS, 2001, 78 (20) :3142-3144