Autoparametric optical drive for micromechanical oscillators

被引：91

作者：

Zalalutdinov, M ^{[1
]}

Zehnder, A ^{[1
]}

Olkhovets, A ^{[1
]}

Turner, S ^{[1
]}

Sekaric, L ^{[1
]}

Ilic, B ^{[1
]}

Czaplewski, D ^{[1
]}

Parpia, JM ^{[1
]}

Craighead, HG ^{[1
]}

机构：

[1] Cornell Univ, Ctr Mat Res, Ithaca, NY 14853 USA

来源：

APPLIED PHYSICS LETTERS | 2001年 / 79卷 / 05期

关键词：

D O I：

10.1063/1.1388869

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Self-generated vibration of a disk-shaped, single-crystal silicon micromechanical oscillator was observed when the power of a continuous wave laser, focused on the periphery of the disk exceeded a threshold of a few hundred muW. With the laser power set to just below the self-generation threshold, the quality factor for driven oscillations increases by an order of magnitude from Q=10 000 to Q(enh)=110 000. Laser heating-induced thermal stress modulates the effective spring constant via the motion of the disk within the interference pattern of incident and reflected laser beams and provides a mechanism for parametric amplification and self-excitation. Light sources of different wavelengths facilitate both amplification and damping. (C) 2001 American Institute of Physics.

引用

页码：695 / 697

页数：3

共 18 条

[1]

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[2] PHOTOTHERMAL EXCITATION AND SELF-EXCITATION OF SILICON MICRORESONATORS [J].