All-solid-state thin film rocking chair lithium batteries were fabricated on 80 mu m thick, flexible aluminum foil substrates with the cell configuration of V2O5/Lipon/Li8V2O5 using sequential thin film deposition techniques. The total thickness of the device was 1.41 mu m. The battery cells incorporated thin film electrodes of highly lithiated vanadium oxide as an anode and vanadium oxide as a cathode. By controlling the lithium concentration in the lithiated vanadium oxide anode, an operating voltage ranging from 3 to 1 V was obtained. These cells with a 15 cm(2) active area delivered a discharge capacity of 50 mu Ah at room temperature and showed negligible capacity fade from the second cycle to more than 5800 cycles at a current density of 10 mu A/cm(2). (C) 1999 The Electrochemical Society. S1099-0062(99)04-024-9. All rights reserved.