A micro lens actuator for optical flying head

被引：13

作者：

Hata, S ^{[1
]}

Yamada, Y ^{[1
]}

Ichihara, J ^{[1
]}

Shimokohbe, A ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Tokyo 152, Japan

来源：

FIFTEENTH IEEE INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS, TECHNICAL DIGEST | 2002年

关键词：

D O I：

10.1109/MEMSYS.2002.984320

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

For a high capacity magneto-optical recording, a new electrostatic actuator which is called a micro lens actuator (MLA) for an optical flying head (OFH) has been designed and fabricated. The MLA is characterized by its moving electrode made of the Pd-based thin film metallic glass (TFMG, Pd76Cu7Si17: atomic %). Annealing at its supercooled liquid region (SCLR) is adopted for relaxation of internal stress in the moving electrode to fabricate a huge, flat and thin moving electrode plate. The experimental MLA shows 0.85 mum / 50 V maximum stroke, 0.02 degree tilt error and 3.55 kHz resonance frequency.

引用

页码：507 / 510

页数：4

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