Fabrication of thin film metallic glass and its application to microactuator

被引：33

作者：

Hata, S ^{[1
]}

Sato, K ^{[1
]}

Shimokohbe, A ^{[1
]}

机构：

[1] Tokyo Inst Technol, Precis & Intelligence Lab, Midori Ku, Yokohama, Kanagawa 2268503, Japan

来源：

DEVICE AND PROCESS TECHNOLOGIES FOR MEMS AND MICROELECTRONICS | 1999年 / 3892卷

关键词：

MEMS; electrostatic microactuator; metallic glass; micro forming; supercooled liquid;

D O I：

10.1117/12.364504

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Metallic glasses are kinds of amorphous alloys. They are free from defects resulting from crystalline structures. Metallic glasses soften in a certain temperature range called the supercooled liquid region, which makes metallic glasses easily be formed into a 3D shape. This paper first describes a fabrication method for a thin film metallic glass (TFMG) using RF magnetron sputtering. Secondly A micro beam of TFMG is introduced. Although the fabricated micro beams bent due to the internal stress caused by sputtering, this stress was relaxed by annealing the beams in the supercooled liquid region, and straight beams were fabricated. Secondly, curved micro beams of TFMG were micro formed by heating the straight beams again into the supercooled liquid state. Finally, a new type electrostatic microactuator of a conical spring shape (Conical Spring Linear Actuator: CSLA) was made of TFMG. CSLA was capable of stepwise motion vertical to the substrate. The 10 mu m step height and 30 mu m total height (four steps) were realized.

引用

页码：97 / 108

页数：12

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