Dielectric and ferroelectric response of sol-gel derived Pb0.85La0.15TiO3 ferroelectric thin films on different bottom electrodes

被引:13
作者
Bhaskar, S
Majumder, SB
Dobal, PS
Krupanidhi, SB
Katiyar, RS [1 ]
机构
[1] Univ Puerto Rico, Dept Phys, San Juan, PR 00931 USA
[2] Indian Inst Sci, Mat Res Ctr, Bangalore 560012, Karnataka, India
关键词
sol-gel; bottom electrodes; auger electron spectroscopy; ruthenium oxide; ferroelectric proporties; ruthenium;
D O I
10.1016/S0040-6090(01)01784-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Sol-gel derived Pb0.85La0.15TiO3 thin films were deposited on Pt, Pt/Si, RuO2/Pt/Si and RuO2/Si bottom electrodes. The structural and microstructural characteristics of the films were studied using X-ray diffraction and atomic force microscopy techniques. Dielectric, ferroelectric and leakage current characteristics were evaluated and depth profile Auger electron spectroscopy was used to obtain direct evidence for reactivity and compositional changes at the film/electrode interface and determine their effect on the ferroelectric and dielectric properties of films. Films deposited on Pt electrode showed a relatively higher dielectric constant of approximately 1300, while the films on RuO2 exhibited lower dielectric constant of only 470. J-t characteristics with leak-age current of approximately 10(-8) A/cm(2) under low biasing field (10 kV/cm) was observed for the films under study. The steady state field dependent de conductivity was examined by the measurement of J-E characteristics. At very low fields (< 30 kV/cm) films followed ohmic behavior and was fitted with a space-charge-limited conduction mechanism in the intermediate fields (30-60 kV/cm). The on-set voltage for the non-linearity was considered as V-TFL using which, the trap concentration estimated for films on RuO2/Si electrode was 1.23 X 10(17) cm(-3). Observed current characteristics have been correlated with large interfacial resistance at the film-electrode boundary. In the case of RuO2 bottom electrodes, the dielectric and ferroelectric properties are correlated with the electrode characteristics and Si diffusion at the film-electrode interface. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
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页码:30 / 39
页数:10
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