Physical properties of sputtered molybdenum oxide thin films suitable for gas sensing applications

被引：37

作者：

Manno, D

Di Giulio, M

Serra, A

Siciliano, T

Micocci, G

机构：

[1] Univ Lecce, Dipartimento Sci Mat, I-73100 Lecce, Italy

[2] INFM, I-73100 Lecce, Italy

来源：

JOURNAL OF PHYSICS D-APPLIED PHYSICS | 2002年 / 35卷 / 03期

关键词：

D O I：

10.1088/0022-3727/35/3/310

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Molybdenum oxide thin films were obtained by r.f. reactive sputtering of a molybdenum target. Optical and electrical characterization was performed in order to determine the energy gap and to investigate the electrical transport mechanism. In particular, electrical characterization showed that the transport properties of our thin films were governed by a scattering mechanism associated with the inter-grain barrier height. Finally, the analysis of the electrical behaviour of these films in controlled atmosphere allowed us to test the gas sensing properties, and to show that the conduction energy increased in the presence of electroactive gases.

引用

页码：228 / 233

页数：6

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