Formation of lithographic metallic hetero-contacts

被引：8

作者：

Gribov, NN

Caro, J

Radelaar, S

机构：

[1] DELFT UNIV TECHNOL,DELFT INST MICROELECTR & SUBMICRON TECHNOL,2628 CJ DELFT,NETHERLANDS

[2] UKRAINIAN ACAD SCI,BI VERKIN INST LOW TEMP PHYS & ENGN,KHARKOV 310164,UKRAINE

来源：

PHYSICA B | 1996年 / 218卷 / 1-4期

关键词：

D O I：

10.1016/0921-4526(95)00568-4

中图分类号：

O469 [凝聚态物理学];

学科分类号：

070205 ;

摘要：

We have made an electron-microscopy study of nanoholes in membranes in successive stages of one-sided deposition of Au and Ag, as is relevant for hetero-contacts. Key results are: (i) the holes are not filled during deposition and (ii) closing of the holes is by lateral growth of the film on the membrane.

引用

页码：97 / 100

页数：4

共 9 条

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