Preparation of diamond-like carbon thin films by shielded are ion plating

被引：19

作者：

Taki, Y

Kitagawa, T

Takai, O

机构：

[1] Dept. of Mat. Processing Engineering, Nagoya University, Chikusa-ku, Nagoya 464-01, Furo-cho

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 1997年 / 16卷 / 07期

关键词：

D O I：

10.1023/A:1018513804905

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

[No abstract available]

引用

页码：553 / 556

页数：4

共 11 条

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